Products Archive - Page 4 of 4 - Lam Research
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Archives: Products

  • ALTUS Product Family

    Combining CVD and ALD technologies, these market-leading systems deposit highly conformal metal films for advanced tungsten metallization applications.

  • SABRE 3D Product Family

    Using our proven Electrofill technology, these high-productivity systems deliver quality metal films for advanced packaging applications.

  • SABRE Product Family

    This product family offers precision metal plating for copper damascene manufacturing on the industry’s productivity-leading ECD platform.

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