Transducers are devices that change some type of energy – such as light, motion, heat, or a chemical reaction – from one form into another. For example, actuators are a type of transducer that convert energy into motion. When the output of a transducer converts the energy to a readable format (an analog or digital representation), it is called a sensor. Many types of transducers and sensors are used to convert and measure signals generated in the environment all around us, and their applications continue to grow. While producing these specialty devices generally does not necessarily require the latest generations of processing equipment, it does require the development of processes to support many unique device designs. Also, some of the fabrication steps involve materials not used in other device types, such as piezoelectric thin films. As a result, equipment technical capability, reliability, productivity, and overall cost-effectiveness are critical.
Sensors & Transducers
Our Solutions
Coventor Product Family
Plasma Modeling Semiconductor Process Modeling
Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.
DSiE Product Family
Deep Reactive Ion Etch (DRIE)
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
DV-Prime & Da Vinci Product Families
Wet Clean
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
Kiyo Product Family
Reactive Ion Etch (RIE)
These market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.
Metior Product Family
Mass Metrology
Our mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.
OverViz
Plasma Modeling
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
Pulsus Product Family
Pulsed Laser Deposition (PLD)
Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.
Reliant Clean Products
Reliant Systems Wet Clean/Strip
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Deposition Products
Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems
Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Etch Products
Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems
Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
SEMulator3D
Semiconductor Process Modeling
SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.
SP Series Product Family
Wet Clean
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
SPEED Product Family
High-Density Plasma Chemical Vapor Deposition (HDP-CVD)
These dielectric deposition products provide complete gapfill of high aspect ratio spaces with industry-leading throughput and reliability.
Syndion Product Family
Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE)
For deep etch applications, this product family provides the exceptional across-wafer uniformity control needed for critical high aspect ratio features.
VECTOR Product Family
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Our PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.
Recent Blog Posts
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How Lam Research Enables a Sensational Technology: Haptics
Aug 31, 2023Imagine an immersive virtual experience where your sense of touch seems every bit as real as the sights and sounds of the digital world you’re exploring. Feel the sensation of catching a ball in your hands or the keys clicking on a virtual keyboard, even though they only exist in cyberspace. The sensations are the results of haptic technologies enabled in part by innovations from Lam.
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Pulsus Is a Breakthrough for PiezoMEMS Devices
Jun 18, 2024In a previous blog post, we introduced the Pulsus PLD system, a novel deposition technology developed by Lam Research to enable the production of high-quality AlScN films for piezoMEMS applications. In this post, we explain how the Pulsus system works, and how it can achieve superior film quality and performance compared to conventional technologies.