Solution: Mini/Micro LED
Kallisto Product Family
Electrochemical Deposition (ECD)
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
Advanced Memory, Advanced Packaging, Advanced Substrates, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics, Panel Level Fanout
Phoenix Product Family
Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
Advanced Memory, Advanced Packaging, Advanced Substrates, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics, Panel Level Fanout
Triton Product Family
Electrochemical Deposition (ECD) Wet Clean/Strip
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.
Advanced Memory, Advanced Packaging, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics