图形化涉及一系列工艺步骤——包括光刻、沉积和刻蚀——形成集成电路上极小、极复杂的构件。随着每一次更新换代,器件尺寸不断缩小。对于先进结构,因构件尺寸太小和/或封装密度过大,常规光刻技术无法实现(该步骤将芯片设计的复杂细节从掩膜“模板”转印到硅片上)。为了弥补这项不足,芯片制造商已经开始采用涉及多个掩膜和工艺组合的先进技术,如双重/四重图形化和基于侧壁的图形化。即使这些方法弥补了光刻技术的不足,但为了精确生产出所需的高密度精密构件,另外还需要极高的加工精度和薄膜质量。
图形化
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